先进封装与系统集成解决方案

Copper Pillar Bump Flow

Copper Pillar Bump Flow

Plating Solder Bump Flow

Solder Bump Flow

DPS Flow

Dps流程
Item2026-HVM2026-NPI2027-HVM2028-HVM
Tech Node5nm5nm4nm3nm
Wafer Size(Inch)8&128&128&128&12
Wafer TypeSiliconSilicon,Glass carrierSilicon,Glass carrierSilicon,Glass carrier
Notch TypeNotchNotchNotchNotch
Mask Layer3P3M4P4M4P4M5P5M
I/O Pin Count(Die)40000>45000  >45000  >45000
Bump StructureCopper Pillar BumpCu/Ni/SnAgCu/Ni/SnAgCu/Ni/SnAgCu/Ni/SnAg
Plating Solder BumpCu/Ni/SnAg Cu/SnAgCu/Ni/SnAg Cu/SnAgCu/Ni/SnAg Cu/SnAgCu/Ni/SnAg Cu/SnAg
Ball MountCu/SnAgCu/SnAg
Min.Bump Pitch
/Min.Bump Size
Copper Pillar Bump60/40μm50/30μm45/25μm40/20μm
Plating Solder Bump100/65 μm90/45μm90/45μm80/40μm
Ball Mount350/225μm300/150μm
Max.Bump HeightCopper Pillar Bump110μm110μm110μm110μm
Plating Solder Bump85μm95μm95μm95μm
RDL ProcessRDL MaterialCu,Cu/Ni/Au,Cu/Ni/Pd/AuCu,Cu/Ni/Au,Cu/Ni/Pd/AuCu,Cu/Ni/Au,Cu/Ni/Pd/AuCu,Cu/Ni/Au,Cu/Ni/Pd/Au
Min.RDL L/S6/6μm5/5μm4/4μm4/4μm
Max. RDL THK10 μm12 μm12μm12μm